Synthesis of thin film coatings with controlled high-frequency dielectric constant

Аuthors

Abdullin I. S.¹, Ghaliaoutdinov R. T.², Kashapov N. F.¹

1. Kazan National Research Technological University , 68 Karl Marx street , Kazan, Republic of Tatarstan , 420015 , Russian Federation
2. Research Institute Nasosmsh,

Abstract

A thin film coating with controlled dielectric constant synthesis is considered. The problem is solved using low-pressure jet inductive coupled plasma torch. The approach based on variation of high-frequency dielectric constant complex part allows to get zero reflection from a high-reflecting single-layer coating surface at a specified frequency of electromagnetic radiation. Efficiency of the method is demonstrated for aluminum mirrors with reflection factor about 90 per cent. Proposals are given for interference system design and implementation.