A surface temperature influence on sputtering characteristics for boron nitride based ceramics

Аuthors

Semenov P. N.

Moscow Aviation Institute (National Research University), 4, Volokolamskoe shosse, Moscow, А-80, GSP-3, 125993, Russia

e-mail: k502@mai.ru

Abstract

Experimental results are presented to study influence of surface temperature on values of sputtering yield for boron nitride based ceramics with surfaces irradiated by 300 eV Xe+ ion flows. The surface temperature varies in this case in the 300-1100°C.

Keywords:

ions; plasma; surface; sputtering; surface temperature